使用本公司核心技術,非常小的占地面積的12英寸機型。高生產效率,高加工品質,低使用成本。
規格
Max. work size | Φ 305 mm | |||||||||
Max. number of frames | 12 inch (SEMI G74-0699) | |||||||||
Spindle | Rotation | 60,000 min-1 | ||||||||
80,000 min-1 (Option) | ||||||||||
Max. blade diameter | Φ 60 mm (2-Inch) Φ 80 mm (3-Inch) (Option) | |||||||||
Rated Output | 1.8 KW | |||||||||
X axis | Available cutting range | 310 mm | ||||||||
Max. Speed | 1,000 mm/s | |||||||||
Y1/Y2 axes | Available cutting range | 310 mm | ||||||||
Max. Speed | 300 mm/s | |||||||||
ResolutionResolution | 0.078 μm | |||||||||
Accuracy | 0.002 mm / 310 mm | |||||||||
Z1/Z2 axes | Stroke | 35 mm | ||||||||
Resolution | 0.002 μm | |||||||||
Max. Speed | 80 mm/sec | |||||||||
Repeatability | 0.001 mm | |||||||||
θ axis | Range of rotation | 380° | ||||||||
Misc | Voltage | 3 Phase AC200 to 220 V ±10% (Transformer adoptable) | ||||||||
Power consumption | 6.0 kVA (MAX) | |||||||||
Air pressure | 0.55 ~ 0.7 MPa | |||||||||
Avg. Air consumption | 210 L/min (0.55 MPa) | |||||||||
Avg.Clean Air consumption | 140 L/min | |||||||||
Cutting Water, and others (pressure) | 0.3 ~ 0.5 MPa | |||||||||
Cutting Water, and others (Max Flow) | Cutting water: 10.0 L/min Water curtain: 3.0 L/min Others: 0.6 L/min | |||||||||
Cooling Water (pressure) | 0.3 ~ 0.5 MPa | |||||||||
Cooling Water (Max Flow) | 3.4 L/min (0.3 MPa) | |||||||||
Exhaust | 5.0 m3/ min more | |||||||||
Size (W*D*H) | 1,290 mm x 1,530 mm x 1,900 mm | |||||||||
Weight | 1,360 kg |